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Figure 1
(a) Scanning electron micrograph of the outermost zones of the Fresnel zone plate taken under normal incidence. The outermost zone width corresponds to the desired 132 nm. (b) The outermost zones viewed at a 45° tilt angle. The height of the zone plate is 153 ± 5 nm, yielding the maximum possible efficiency at 70 eV. (c) Optical micrograph of the Fresnel zone plate, showing that the structures are clean and regular. The vertical and horizontal lines correspond to the stitching of main fields in the electron beam lithography tool. (d) Fresnel zone plate mounted onto the chip with a laser-cut central beam stop.

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
Volume 26| Part 2| March 2019| Pages 467-472
https://doi.org/10.1107/S1600577519000869
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