journal menu
![[Figure 2]](ve5093fig2mag.jpg)
|
|
Figure 2
(a) Spot profile in focus at a photon energy of 80 eV as reconstructed from an exposed and solvent-treated PMMA film. The beam intensity is linear with the colour scale. (b) Knife-edge scan in the horizontal (blue) and vertical (red) direction. Dots represent the experimental data; the solid lines are fit with the error function, supposing a Gaussian shape of the first derivative (dashed lines). Its FWHM is 0.38 µm and 0.46 µm. (c) Scanning micrograph of a Siemens Star test pattern recorded at 70 eV in 100 nm-wide steps. (d) One-dimensional Fourier shell correlation of the image depicted in (c). The frequency cut-off in the horizontal scanning direction corresponds to 0.44 µm. |
![[Figure 2]](ve5093fig2.jpg)
 | JOURNAL OF SYNCHROTRON RADIATION |
ISSN: 1600-5775
access
