Figure 3
Comparison of the spectral distributions of the system at the detector domain, for three different sets of d and Mc, at the radiation wavelength of 5 nm. The imaging quality is evaluated by the justified standard deviation of the meridional coordinates Q of the outgoing rays (vertical distribution). The larger the Q value, the worse the imaging quality; and vice versa. (a) Mc = −0.6, d = 1 m, Qa = 0.441. (b) Mc = −0.25, d = 6 m, Qb = 0.795. (c) Mc = −0.15, d = 3 m, Qc ≃ 1.923. |