Figure 4
Q-value representing the justified standard deviation of the meridional coordinates of the ray-tracing spot diagram, and the ideal resolving power of A4 is given by equation (4); both of them are crucial parameters for the system optimization. (a) Q distribution profile (blue mesh, for 5 nm), with dependence on d and Mc. The restriction Q(d,Mc) < 0.51 gives the projection domain in the plane of Q = 0, where the small circles on the plane indicate that only within this regime is the quality of the spectral distribution good enough. (b) A4 distribution profile, and the dependence with d and Mc. The curves with various colours in the plane of A4 = 0 are associated with the equal-resolution contour from the A4 profile. Thus, a set of optimal parameters were found: Mc = −0.427, d = 14.02 m, corresponding to an ideal resolving power of 285000. The scatter plots in (c) show Q distributions (0.41 < Q < 0.55) for the systems with different sets of Mc and d at various wavelengths: 2 nm (stars), 3.5 nm (circles) and 5 nm (squares). Confining Q5nm below a certain value (Q5nm < 0.51) means that the imaging quality of the entire spectral range is satisfied. |