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Figure 3
The π and π/2 phase gratings used in the single-phase-grating setup. (a) Si π grating, d1 = 2.725 µm, height h = 11 µm; (b) Si π grating, d1 = 14.142 µm, h = 12 µm; (c,d) CVD diamond π/2 phase grating, d1 = 2.282 µm, h = 2.932 µm.

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