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Figure 5
Distances calibration of Si π-phase shifting grating with diagonal pitch size 2.725 µm.

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
Volume 26| Part 4| July 2019| Pages 1115-1126
https://doi.org/10.1107/S1600577519005721
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