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Figure 7
Flowchart of the moiré XGI algorithm with horizontally (af) and vertically (a′–f′) aligned line gratings (see text). (g) Lineout stack of wavefront errors in the vertical direction showing gradual improvement as the phase plate is moving toward the central position (0 µm). (h) Comparison of wavefront errors between moiré XGI [bottom line in (g)] and single-phase-grating Talbot interferometry (dashed line) at the central phase plate position (0 µm). The blue rectangle is marking the expected λ/4 wavefront error improvement compared with ∼1.5λ denoted by vertical segment in panel (g). (i) Vertical through-focus and focal plane intensity profile retrieved using amplitude and phase back-propagation. The amplitude profile extends over the first-order amplitude peak center in vertical direction, the related height profile is seen in panel (h). The vertical beam waist profile with ∼220 nm FWHM was extracted along the dashed segment.

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