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Figure 2
The RF (13.56 MHz) plasma cleaning system developed in-house. The optical surface to be cleaned was kept perpendicular to the surface of the electrodes. The dimensions of the electrodes are 300 × 100 × 5 mm. Ar and O2 were used as feedstock gases for plasma generation.

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
Volume 26| Part 4| July 2019| Pages 1152-1160
https://doi.org/10.1107/S1600577519003485
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