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Figure 4
(a) Energy-dependent SXR spectra (750 to 1500 eV) of the mirror before and after RF plasma cleaning at a 2° incidence angle. (b) The fractional change (ΔR) in SXR after plasma cleaning. |
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Figure 4
(a) Energy-dependent SXR spectra (750 to 1500 eV) of the mirror before and after RF plasma cleaning at a 2° incidence angle. (b) The fractional change (ΔR) in SXR after plasma cleaning. |