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Figure 2
Dependences calculated for a W/B4C grating with φ = 1.76° and β = 20°: (a) shift of the grating topmost boundary profile versus the deposition flux incidence angle; (b) shift of the grating boundary profile (α = 150°) versus the number of layers.

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
Volume 26| Part 5| September 2019| Pages 1539-1545
https://doi.org/10.1107/S1600577519006337
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