view article
Figure 3
Dependences calculated for a W/B4C grating with φ = 1.76° and β = 20°: (a) height of the grating topmost boundary profile versus the deposition flux incidence angle; (b) height change of grating (α = 150°) versus the number of layers. Inset: view of the upper parts of the topmost boundary profiles obtained for different deposition flux incidence angles.

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
Volume 26| Part 5| September 2019| Pages 1539-1545
https://doi.org/10.1107/S1600577519006337
Follow J. Synchrotron Rad.
Sign up for e-alerts
E-alerts
Follow J. Synchrotron Rad. on Twitter
Twitter
Follow us on facebook
Facebook
Sign up for RSS feeds
RSS