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Figure 6
Efficiencies calculated for the Cr/C grating with φ = 1.05°, and β = 10° or β = 80° versus radiation incidence angle: (a) for ideal conformal and ideal shifted boundary profiles; (b) for realistic shifted boundary profiles ( corresponds to enhanced smoothing of the grating calculated for ν4 = 250 nm4 s−1 in the first layer and ν4 = 200 nm4 s−1 in the second layer).

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