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Figure 2
Reflecto-interferograms from Si3N4 membranes with thicknesses of (a) 200 nm, (b) 500 nm and (c) 1000 nm. The 100 µm scale corresponds to 224 µrad. |
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Figure 2
Reflecto-interferograms from Si3N4 membranes with thicknesses of (a) 200 nm, (b) 500 nm and (c) 1000 nm. The 100 µm scale corresponds to 224 µrad. |