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Figure 11
Measured off-plane efficiency angular spectra of the fabricated gratings (at a wavelength of 5 nm and an incidence angle of 83°) as a function of the diffraction angle. |
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Figure 11
Measured off-plane efficiency angular spectra of the fabricated gratings (at a wavelength of 5 nm and an incidence angle of 83°) as a function of the diffraction angle. |