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Figure 9
Optimized and fabricated profiles of the gratings. The simulation was performed as functions of depth and duty cycle at a wavelength of 3 nm and an incidence angle of 88.65°. This implies that grating efficiencies would be improved if both the depth and duty cycle of the two samples approach the centre (point O) with a depth of 6.5 nm and duty cycle of 0.40.

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
Volume 26| Part 5| September 2019| Pages 1782-1789
https://doi.org/10.1107/S1600577519008245
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