Figure 11
KB system spot size determination by means of different techniques, at 32 nm wavelength with FEL1. Left: reconstructed spot from wavefront sensor data, 5.5 µm × 6.2 µm (FWHM). Right: PMMA-indentation post-mortem analysis of a focal spot created by KB system, estimation size 6 µm × 7 µm (FWHM). |