Figure 12
KB system spot size determination by means of different techniques, at 4.14 nm wavelength with FEL2. Left: reconstructed spot from wavefront sensor data, 1.8 µm × 2.4 µm (FWHM). Right: PMMA-indentation post-mortem analysis of a focal spot created by KB system, estimation size 2.0 µm × 2.5 µm (FWHM). |