|
Figure 9
Residual of the wavefront after an optics optimization at 20 nm wavelength. The surface is quite flat with r.m.s. = 0.051 units of λ. |
|
Figure 9
Residual of the wavefront after an optics optimization at 20 nm wavelength. The surface is quite flat with r.m.s. = 0.051 units of λ. |