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Figure 2
(a) Target thickness profile (blue line) and XRR experimental result (red dots) versus position of a Cr test coating on a 280 mm-long Si substrate. (b) Corresponding calculated (blue line) and measured (red dots) speed profiles along the stroke of the substrate carrier. Full duty cycles (back and forth) were applied.

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
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