view article
Figure 2
(a) Target thickness profile (blue line) and XRR experimental result (red dots) versus position of a Cr test coating on a 280 mm-long Si substrate. (b) Corresponding calculated (blue line) and measured (red dots) speed profiles along the stroke of the substrate carrier. Full duty cycles (back and forth) were applied.

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
Volume 26| Part 6| November 2019| Pages 1872-1878
https://doi.org/10.1107/S1600577519012256
Follow J. Synchrotron Rad.
Sign up for e-alerts
E-alerts
Follow J. Synchrotron Rad. on Twitter
Twitter
Follow us on facebook
Facebook
Sign up for RSS feeds
RSS