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Figure 7
(Left) Flat substrate metrology and (right) multilayer metrology. For the flat substrate: (a) First raw image of the speckle generator upon total external reflection on the mirror. (b), (c) Measured tangential curvature of the mirror, light being reflected in the vertical direction and falling onto the square marked in panel (a); corresponding tangential (b) slope error and (c) height error. (d) Intensity (black line), curvature (purple line) and height profile (pink line) measured across the mirror along the dashed line in (a). For the multilayer coated mirror: (e) First raw image of the speckle generator upon reflection on the mirror surface. (f) The intensity modulation across the reflected beam marked by the dashed line in (e) is plotted in blue and the curvature measured for this same profile is plotted in green. (g) Enlargement of the region marked by the red square in (f) after the removal of a polynomial of order two. (h) Slope and height profiles corresponding to the curvature of (g).

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
Volume 27| Part 2| March 2020| Pages 293-304
https://doi.org/10.1107/S1600577520000508
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