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Figure 1
(a) Sketch of the experimental geometry of GIXRF. D: energy-dispersive silicon drift detector; α: angle of incidence; k0: wave vector of the incident beam. (b) Sketch of a 2D structure (grating: periodic in x direction, finite depth in z direction), with the azimuthal rotation angle ϕ. (c) Sketch of a 3D periodic structure (nanocolumns: periodic in x and y directions, finite depth in z direction).

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