A semi-analytical approach for the characterization of ordered 3D nanostructures using grazing-incidence X-ray fluorescence

Nikolaev, K.V.; Soltwisch, V.; Hönicke, P.; Scholze, F.; de la Rie, J.; Yakunin, S.N.; Makhotkin, I.A.; van de Kruijs, R.W.E.; Bijkerk, F.

doi:10.1107/S1600577519016345

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Figure 3
N-Kα GIXRF intensity, measured for various azimuthal orientation angles: (a) ϕ = 0° – conical, (b) ϕ = 0.2°, (c) ϕ = 1° and (d) ϕ = 3°. Red lines: numerical simulation; gray markers: experimental values.

JOURNAL OF
SYNCHROTRON
RADIATION

ISSN: 1600-5775

Volume 27| Part 2| March 2020| Pages 386-395

https://doi.org/10.1107/S1600577519016345

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