A semi-analytical approach for the characterization of ordered 3D nanostructures using grazing-incidence X-ray fluorescence

Nikolaev, K.V.; Soltwisch, V.; Hönicke, P.; Scholze, F.; de la Rie, J.; Yakunin, S.N.; Makhotkin, I.A.; van de Kruijs, R.W.E.; Bijkerk, F.

doi:10.1107/S1600577519016345

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Figure 4
Comparison between the experimental GIXRF N-Kα map (a) of the Si₃N₄ lamelar grating measured with the incidence photon energy E = 520 eV and the simulated GIXRF map (b) based on a best fit model. (c) Resonant lines in GIXRF map for Si₃N₄ grating structure, caused by interference between the reflected beam and the mth order of diffraction.

JOURNAL OF
SYNCHROTRON
RADIATION

ISSN: 1600-5775

Volume 27| Part 2| March 2020| Pages 386-395

https://doi.org/10.1107/S1600577519016345

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