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Figure 4
Comparison between the experimental GIXRF N-Kα map (a) of the Si3N4 lamelar grating measured with the incidence photon energy E = 520 eV and the simulated GIXRF map (b) based on a best fit model. (c) Resonant lines in GIXRF map for Si3N4 grating structure, caused by interference between the reflected beam and the mth order of diffraction.

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