Figure 4
Accumulated CRL figure errors and their power spectrum density (PSD) for (a) and (b) full-frequency figure errors (FF); (c) and (d) the low-spatial-frequencies (LF); (e) and (g) mid- and high-spatial frequencies (HF). (g) Zernike polynomials (in Noll notation) amplitude from the transmitted wavefront phase from CRL with full errors. The amplitudes are normalized to the wavefront in angströms. The orange bars indicate rotationally symmetric terms. Notable contributions are Z2 and Z3 (tilts), Z4 (defocus), Z8 (horizontal coma), Z11 (first-order spherical aberration) and Z37 (third-order spherical aberration). |