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![[Figure 2]](wz5004fig2mag.jpg)
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Figure 2
Sequence of the HARE chip production. The HARE chips are produced in eight consecutive protection and etching steps described in detail in the text. Dark/light grey = monocrystalline silicon of 450 and 50 µm thickness, respectively. Black = 300 nm layer of SiO2. Blue = 250 nm thermal oxide layer. Red = photoresist. |
![[Figure 2]](wz5004fig2.jpg)
 | JOURNAL OF SYNCHROTRON RADIATION |
ISSN: 1600-5775
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