Figure 5
Sensitivity of fractional Talbot WFS to KB mirror adjustments. WFS retrieved effective focus location changes in the horizontal (left column) and vertical (right column) directions when the KB mirrors were step-scanned following commands in a 2D scanning script. In each set of scans, the vertical KB mirror was kept at the same position before stepping its focus by ∼2 mm, while the horizontal mirror was scanned in ∼1 mm steps for any given vertical mirror position. The same WFS was used for measurements at 1000 eV (top row) and 1500 eV (bottom row). |