Figure 2
Schematic diagram of the SRLC improvement from the pencil beam to the brush beam. (a) SRLC using the pencil-beam scan in point-to-point mode. (b) The system-calibration process of the SRLC when using the brush beam; the correction-factor set is obtained in a line-to-point manner. (c) The brush-beam scan process of the SRLC. The purple arrow (two-way arrow) in the figure represents the moving direction of the sample-stages table during the measurement. The stages in (a) and (b) move parallel to the paper direction ([] direction), and the stages in (c) move perpendicular to the paper direction ([] direction). The blue arrow in (a) indicates the point-by-point mapping mode of the pencil beam, while the blue rectangle in (c) indicates the area where the mapping mode is like painting by a brush. |