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Figure 2
Schematic diagram of the SRLC improvement from the pencil beam to the brush beam. (a) SRLC using the pencil-beam scan in point-to-point mode. (b) The system-calibration process of the SRLC when using the brush beam; the correction-factor set is obtained in a line-to-point manner. (c) The brush-beam scan process of the SRLC. The purple arrow (two-way arrow) in the figure represents the moving direction of the sample-stages table during the measurement. The stages in (a) and (b) move parallel to the paper direction ([ ![]() ![]() |