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Figure 7
Measurements on a monocrystalline silicon sample 9.R1 using the improved SRLC, where the spatial resolution is 0.5 mm × 0.5 mm. (a) Raw data from the measurement by the brush-beam mapping. (b) The result after correction. |
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Figure 7
Measurements on a monocrystalline silicon sample 9.R1 using the improved SRLC, where the spatial resolution is 0.5 mm × 0.5 mm. (a) Raw data from the measurement by the brush-beam mapping. (b) The result after correction. |