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Figure 4
Vertical focus profile for a short-focal-length configuration, with 60 keV X-rays focused by Si lenses at 68–70 m in the E station. The inset is an SEM image of a device looking down on teeth having 100 µm height and 142 µm period. |
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Figure 4
Vertical focus profile for a short-focal-length configuration, with 60 keV X-rays focused by Si lenses at 68–70 m in the E station. The inset is an SEM image of a device looking down on teeth having 100 µm height and 142 µm period. |