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Figure 6
(a) Step response of LamNI, 40 ms for a 1.5 µm step. (b) In-position stability of LamNI with a 1.1 nm standard deviation. |
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Figure 6
(a) Step response of LamNI, 40 ms for a 1.5 µm step. (b) In-position stability of LamNI with a 1.1 nm standard deviation. |