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Figure 7
The accuracy of the interferometric system was verified by performing a ptychography scan of an integrated circuit sample and then applying a ptychographic position refinement algorithm. The standard deviation of the position errors in (b) and (c) was 4 nm for a reconstruction with a 13 nm pixel size. The position errors indicated by arrows in (a) are upscaled 200× in order to make them visible.

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
Volume 27| Part 3| May 2020| Pages 730-736
https://doi.org/10.1107/S1600577520003586
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