view article
Figure 2
Selection of GISAXS patterns at different processing times during the thermal annealing at 180°C. The dashed vertical and horizontal lines indicate the qy and qz main peak position for the further analysis using line cut profiles. After reaching 180°C (t = 0 s) with a ramp rate of 50°C min−1, GISAXS patterns were collected with a frame rate of 1 frame of 37 ms every 60 s. GISAXS patterns showed a clear scattering evolution of the BCP film during the isothermal process: lobe sharpness and the appearance of vertical second-order peaks along qz were indicative of an increase in the long-range structure of the BCP.

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
Volume 27| Part 5| September 2020| Pages 1278-1288
https://doi.org/10.1107/S1600577520009820
Follow J. Synchrotron Rad.
Sign up for e-alerts
E-alerts
Follow J. Synchrotron Rad. on Twitter
Twitter
Follow us on facebook
Facebook
Sign up for RSS feeds
RSS