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Figure 5
Refractive phase plates and their thickness profiles. (a) Surface of the diamond phase plate used at 8.2 keV, acquired by a Keyence VK-X1100 laser scanning microsope (LSM). The dashed circle represents a diameter of 220 µm. The optically relevant region of the phase plate has a smaller diameter of only 186 µm. (b) Radial height profiles of the diamond phase plate shown in (a) measured via ptychography (green, dotted line) and LSM (orange, dashed line) in comparison with the design goal (blue, solid line). The error for both measurements against the design goal is shown in the lower subplot. (c) 3D rendering of the polymer phase plate used at 35 keV. The model is sliced in the middle for better visibility of the characteristic phase plate shape. (d) Radial height profile of the polymer phase plate shown in (c) measured via ptychography (green, dotted line) in comparison with the design goal (blue, solid line). The error against the design goal is shown in the lower subplot.

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
Volume 27| Part 5| September 2020| Pages 1121-1130
https://doi.org/10.1107/S1600577520007900
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