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Figure 6
(a) The height error and (b) the slope error in the tangential plane of the mirror for gravity sag are small compared with that of clamping. In both plots the manifold–substrate interface is at the far left (x = −150 mm) and the beam center is at x = 0. In panel (a), the approximately 10 nm tall bump at x = −125 mm is caused by the compression of the barrel nut against the mirror substrate.

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