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Figure 2
The finished silicon wafer prepared using the LIGA technique at the X-ray lithography facility at CAMD. It holds MURA of order 19, 37 and 73 as well as other objects such as single pinholes and slits.

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
Volume 27| Part 6| November 2020| Pages 1703-1706
https://doi.org/10.1107/S1600577520012308
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