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Figure 3
Electron micrographs of the MURA coded aperture with 10 µm holes manufactured using the LIGA technique.

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
Volume 27| Part 6| November 2020| Pages 1703-1706
https://doi.org/10.1107/S1600577520012308
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