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Figure 6
Diffraction pattern of transmission topographs of a silicon (001) wafer from the neck of a silicon crystal. The center of the incident X-ray beam image is defined as the origin O of the film. The film size is 101 mm × 126 mm. |
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Figure 6
Diffraction pattern of transmission topographs of a silicon (001) wafer from the neck of a silicon crystal. The center of the incident X-ray beam image is defined as the origin O of the film. The film size is 101 mm × 126 mm. |