Figure 4
GSENSE400BSI-TVISB (red dots) and GSENSE400BSI-GP (blue diamonds) QE measurements compared with a theoretical model (dashed curves). The models are calculated from equation (2) with thicknesses of 30 nm of SiO2, 63 nm of SiN4, 11 µm for the Epi-Si and a dead layer of 60 nm for GSENSE400BSI-TVISB, and thicknesses of 4 µm Epi-Si and a dead layer of 45 nm for GSENSE400BSI-GP. |