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Figure 4
Scattering intensity of the Mo/Si multilayer-coated randomly rough lamellar grating in the EUV versus scattering angle.

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
Volume 28| Part 1| January 2021| Pages 196-206
https://doi.org/10.1107/S160057752001440X
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