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Figure 5
Comparison of bidirectional scanning and traditional unidirectional scanning results. (a) A high-resolution Siemens star pattern measured by the bidirectional scanning method at 760 eV, with a 10 µm × 10 µm range, 1000 × 1000 pixels and 1 ms dwell time. (b) An enlarged view of region I in panel (a). (c) An enlarged view of region II in panel (a). (d) Under the same scan parameters, the ANT star pattern measured by the traditional unidirectional scanning method at the Canadian Light Source. (e) An enlarged view of region I in panel (d). (f) An enlarged view of region II in panel (d).

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
Volume 28| Part 2| March 2021| Pages 512-517
https://doi.org/10.1107/S1600577520016112
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