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Figure 2
(a) Concentration profile of Ge, Ga and P atoms with depth in the GaP epi­layer obtained from SIMS. (b) Depth profile of charge carrier density in the GaP epi­layer measured from ECV. The dip observed in the ECV profile is shown in the inset of the figure.

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
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