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Figure 4
(a) Normalized intensity profiles in the x direction calculated using the MOI model. Intensity profiles in the enlarged regions (b) 0–4 µm, (c) 188–192 µm and (d) 200–204 µm. The black lines denote the results obtained for the EUV-IL, and the red lines denote the results obtained from Fresnel diffraction for a single aperture.

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
Volume 28| Part 3| May 2021| Pages 902-909
https://doi.org/10.1107/S1600577521003398
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