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Figure 7
(a) Intensity profiles at the BPM position with various slit sizes. The curves are theoretical results from the MOI model, and the dots are experimental results from the BPM scanning in the horizontal direction. (b) Intensity ratio (black markers) from the MOI model and normalized PMMA depth (red markers) from AFM with various slit sizes. (c) PMMA aerial image with a 140 nm period.

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
Volume 28| Part 3| May 2021| Pages 902-909
https://doi.org/10.1107/S1600577521003398
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