Figure 11
(a) Linear absorption coefficients μ(e, a) for the non-damaged area and pads 3, 7 and 9. The colors correspond to Fig. 4(c). The dashed black curve corresponds to the non-damaged PFSA(1100) with a target elemental atomic array of (1, 20, 5, 39, 1). Arrows indicate the dose energies: 320 eV (used to generate the data analyzed in this article) and 710 eV (a suitable alternative). (b) Time (dose) evolution of the linear elemental absorption coefficient at dose energies used at the C 1s edge (320 eV) and at the F 1s edge (710 eV). |