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Figure 12
Areal density plotted as a function of exposure time. The colors correspond to Fig. 4[link](c). The arrow indicates the point corresponded to the non-damaged PFSA(1100) with a targeted elemental composition (S1, C20, O5, F39, H1), density of 2.0 g mol−1 and 150 nm thickness. The solid curve is a hyperbolic fit (see Section SI8).

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