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Figure 4
(a) Optical microscopy image in reflectance mode of a PFSA spin-coated film deposited on a silicon nitride (SiNx) window for STXM damage experiments. Panels (b) and (c) are STXM optical density (OD) images: panel (b) was measured before the 9-pad radiation damage experiment at 292.4 eV; panel (c) is the rectangular area in (b), measured at 690 eV after the 9-pad pattern was burned at 320 eV. The area labeled i0 indicates the region that can be used to measure the incident X-ray intensity. Numbers in (c) denote the pad index, the green area is non-damaged PFSA(1100), while the blue, magenta and red boxes indicate pads 3, 7 and 9.

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