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Figure 9
Intended versus actual positions for the upstream and downstream fine-yaw motions over a finely stepped scan. Upstream tracking errors are larger due to the reduced precision of the interferometer interpolator (40×) versus that of the downstream stage (1000×) and are not expected to be indicative of the actual stage positioning accuracy.

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
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