Figure 4
Characterization of the Si3N4 membrane deformation during the injection of a 0.01 M NaBz solution under an actuation pressure difference ΔP = 800 mbar. (a) Profilometry scan providing a 2D map of the bulging. (b) Deformation profile along the z-axis. (c) Deformation profile along the x-axis: raw data (black symbols) and parabolic fit (red line). Maximum deformation is defined as the top value of the parabola (black arrow). |