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Figure 6
Measurements of the soft X-ray beam profile. (a, b) Measurements of the beam profile at the entrance slits for the vertical and horizontal directions, respectively. (c) The horizontal beam profile of the soft X-rays at the sample position. The beam profile was obtained on detecting the beam intensity with a photodiode after a blade moving along the transverse direction. The beam intensity from the photodiode as a function of the blade position is plotted with black circles, together with a green curve showing its Fourier filtered function; the beam profile after the differentiation of the photodiode signal is plotted with a blue curve for its Fourier filtered function. The measured beam sizes of (a), (b) and (c) are 1.97, 44.38 and 3.23 µm at FWHM, respectively.

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