Figure 5
Focusing evaluation by the knife-edge scan with 100 nm steps. (a) One of the recorded images in the knife-edge scan; (b) intensity profiles through the RMLs within heff and transition area t in (a). The distance between intensity peaks is 24 µm. (c) The size of line foci (FWHM) versus the distance of the knife-edge and RML array. The focal distance is 505 mm for 35 keV X-rays. (d) The size of line foci (FWHM) for 60 RMLs at the focal distance. The average X-ray intensity line width is 750 ± 29 nm (vertical focus). |